A deep residual neural network for semiconductor defect classification in imbalanced scanning electron microscope datasets

Autor: López de la Rosa, Francisco, Gómez-Sirvent, José L., Morales, Rafael, Sánchez-Reolid, Roberto, Fernández-Caballero, Antonio
Zdroj: In Applied Soft Computing December 2022 131
Databáze: ScienceDirect