Carbon contamination of EUV mask and its effect on CD performance
| Autor: | Lee, Sangsul, Doh, Jong Gul, Lee, Jae Uk, Lee, Inhwan, Jeong, Chang Young, Lee, Dong Gun, Rah, Seung-yu, Ahn, Jinho |
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| Zdroj: | In Current Applied Physics 2011 11(4) Supplement:S107-S110 |
| Databáze: | ScienceDirect |
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