Very large scale heterogeneous integration (VLSHI) and wafer-level vacuum packaging for infrared bolometer focal plane arrays

Autor: Forsberg, Fredrik, Roxhed, Niclas, Fischer, Andreas C., Samel, Björn, Ericsson, Per, Hoivik, Nils, Lapadatu, Adriana, Bring, Martin, Kittilsland, Gjermund, Stemme, Göran, Niklaus, Frank
Zdroj: In Infrared Physics and Technology September 2013 60:251-259
Databáze: ScienceDirect
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