Very large scale heterogeneous integration (VLSHI) and wafer-level vacuum packaging for infrared bolometer focal plane arrays
| Autor: | Forsberg, Fredrik a, ⁎, Roxhed, Niclas a, Fischer, Andreas C. a, Samel, Björn b, Ericsson, Per b, Hoivik, Nils c, Lapadatu, Adriana c, Bring, Martin c, Kittilsland, Gjermund c, Stemme, Göran a, Niklaus, Frank a |
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| Zdroj: | In Infrared Physics and Technology September 2013 60:251-259 |
| Databáze: | ScienceDirect |
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