Structural characterization and electro-physical properties for SiOC(–H) low-k dielectric films
| Autor: | Zakirov, A.S., Khabibullaev, P.K., Choi, Chi Kyu |
|---|---|
| Zdroj: | In Physica B: Physics of Condensed Matter 15 December 2009 404(23-24):5218-5220 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect