Compositional accuracy of atom probe tomography measurements in GaN: Impact of experimental parameters and multiple evaporation events

Autor: Russo, E. Di, Blum, I., Houard, J., Gilbert, M., Da Costa, G., Blavette, D., Rigutti, L.
Zdroj: In Ultramicroscopy April 2018 187:126-134
Databáze: ScienceDirect