Preparation of a novel catalyst (SoFeIII) and its catalytic performance towards the removal rate of sapphire substrate during CMP process
| Autor: | Xu, Li, Zhang, Xin, Kang, Chengxi, Wang, Rongrong, Zou, Chunli, Zhou, Yan, Pan, Guoshun |
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| Zdroj: | In Tribology International April 2018 120:99-104 |
| Databáze: | ScienceDirect |
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