Preparation of a novel catalyst (SoFeIII) and its catalytic performance towards the removal rate of sapphire substrate during CMP process
| Autor: | Xu, Li a, b, c, ∗∗, Zhang, Xin a, Kang, Chengxi a, Wang, Rongrong a, Zou, Chunli a, b, c, Zhou, Yan a, b, c, Pan, Guoshun a, b, c, ∗ |
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| Zdroj: | In Tribology International April 2018 120:99-104 |
| Databáze: | ScienceDirect |
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