Superhard oxidation-resistant Ti1-xAlxBy thin films grown by hybrid HiPIMS/DCMS co-sputtering diboride targets without external substrate heating
Autor: | Wicher, B., Pshyk, O.V., Li, X., Bakhit, B., Rogoz, V., Petrov, I., Hultman, L., Greczynski, G. |
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Zdroj: | In Materials & Design February 2024 238 |
Databáze: | ScienceDirect |
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