Superhard oxidation-resistant Ti1-xAlxBy thin films grown by hybrid HiPIMS/DCMS co-sputtering diboride targets without external substrate heating

Autor: Wicher, B., Pshyk, O.V., Li, X., Bakhit, B., Rogoz, V., Petrov, I., Hultman, L., Greczynski, G.
Zdroj: In Materials & Design February 2024 238
Databáze: ScienceDirect