Effects of ion bombardment and gas incorporation on the properties of Mo/a-Si:H multilayers for EUV applications

Autor:	Rigato, V. *, Patelli, A., Maggioni, G., Salmaso, G., Mattarello, V., Pelizzo, M.G., Nicolosi, P., Depero, L., Bontempi, E., Mazzoldi, P.
Zdroj:	In Surface & Coatings Technology 2003 174:40-48
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect