Effects of ion bombardment and gas incorporation on the properties of Mo/a-Si:H multilayers for EUV applications
| Autor: | Rigato, V. *, Patelli, A., Maggioni, G., Salmaso, G., Mattarello, V., Pelizzo, M.G., Nicolosi, P., Depero, L., Bontempi, E., Mazzoldi, P. |
|---|---|
| Zdroj: | In Surface & Coatings Technology 2003 174:40-48 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect