Forming sub-45-nm high-aspect circle-symmetric spots with double bowtie aperture combined with metal-insulator-metal structure
Autor: | Zheng, Jie, Chen, Weidong, Liu, Xianchao, Huang, Yuerong, Liu, Yunyue, Li, Ling, Xie, Zhengwei |
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Zdroj: | In Applied Surface Science 31 July 2018 447:300-306 |
Databáze: | ScienceDirect |
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