Forming sub-45-nm high-aspect circle-symmetric spots with double bowtie aperture combined with metal-insulator-metal structure

Autor: Zheng, Jie, Chen, Weidong, Liu, Xianchao, Huang, Yuerong, Liu, Yunyue, Li, Ling, Xie, Zhengwei
Zdroj: In Applied Surface Science 31 July 2018 447:300-306
Databáze: ScienceDirect
načítá se...