High resolution 3D NanoImprint technology: Template fabrication, application in Fabry–Pérot-filter-array-based optical nanospectrometers

Autor: Wang, Xiaolin, Albrecht, Alla, Mai, Hanh H., Woidt, Carsten, Meinl, Tamara, Hornung, Michael, Bartels, Martin, Hillmer, Hartmut
Zdroj: In Microelectronic Engineering October 2013 110:44-51
Databáze: ScienceDirect
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