High resolution 3D NanoImprint technology: Template fabrication, application in Fabry–Pérot-filter-array-based optical nanospectrometers
| Autor: | Wang, Xiaolin, Albrecht, Alla, Mai, Hanh H., Woidt, Carsten, Meinl, Tamara, Hornung, Michael, Bartels, Martin, Hillmer, Hartmut |
|---|---|
| Zdroj: | In Microelectronic Engineering October 2013 110:44-51 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect