Nanoprober-based EBIC measurements for nanowire transistor structures
Autor: | Arstila, K., Hantschel, T., Schulze, A., Vandooren, A., Verhulst, A.S., Rooyackers, R., Eyben, P., Vandervorst, W. |
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Zdroj: | In Microelectronic Engineering May 2013 105:99-102 |
Databáze: | ScienceDirect |
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