Nanoprober-based EBIC measurements for nanowire transistor structures

Autor: Arstila, K., Hantschel, T., Schulze, A., Vandooren, A., Verhulst, A.S., Rooyackers, R., Eyben, P., Vandervorst, W.
Zdroj: In Microelectronic Engineering May 2013 105:99-102
Databáze: ScienceDirect