Influence of polymer phase separation on roughness of resist features in UVIII

Autor:	Yasin, Shazia, Khalid, M.N., Hasko, D.G., Ahmed, Haroon
Zdroj:	In Microelectronic Engineering 2004 73:259-264
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect