Influence of polymer phase separation on roughness of resist features in UVIII
| Autor: | Yasin, Shazia a, ∗, Khalid, M.N. b, Hasko, D.G. a, Ahmed, Haroon a |
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| Zdroj: | In Microelectronic Engineering 2004 73:259-264 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Yasin, Shazia a, ∗, Khalid, M.N. b, Hasko, D.G. a, Ahmed, Haroon a |
|---|---|
| Zdroj: | In Microelectronic Engineering 2004 73:259-264 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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