High strain behavior of composite thin film piezoelectric membranes

Autor:	Demir, I., Olson, A.L., Skinner, J.L., Richards, C.D., Richards, R.F., Bahr, D.F.
Zdroj:	In Microelectronic Engineering 2004 75(1):12-23
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect