High strain behavior of composite thin film piezoelectric membranes
| Autor: | Demir, I., Olson, A.L., Skinner, J.L., Richards, C.D., Richards, R.F., Bahr, D.F. |
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| Zdroj: | In Microelectronic Engineering 2004 75(1):12-23 |
| Databáze: | ScienceDirect |
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