Surface blistering of low temperature annealed hydrogen and helium co-implanted germanium and its application to splitting of bonded wafer substrates
| Autor: | Hurley, R.E., Wadsworth, H., Montgomery, J.H., Gamble, H.S. |
|---|---|
| Zdroj: | In Vacuum 2009 83 Supplement 1:S29-S32 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect