X-ray reflectivity study on TiN/Ti/Si structures before and after annealing
| Autor: | Santucci, S. a, *, Giuliani, P. a, Picozzi, P. a, Phani, A.R. a, De Biase, M. b, Alfonsetti, R. b, Moccia, G. b, Missori, M. b |
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| Zdroj: | In Thin Solid Films 2000 360(1):89-95 |
| Databáze: | ScienceDirect |
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