X-ray reflectivity study on TiN/Ti/Si structures before and after annealing
| Autor: | Santucci, S. *, Giuliani, P., Picozzi, P., Phani, A.R., De Biase, M., Alfonsetti, R., Moccia, G., Missori, M. |
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| Zdroj: | In Thin Solid Films 2000 360(1):89-95 |
| Databáze: | ScienceDirect |
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