Formation of the Structured Indium Tin Oxide Films by Magnetron Sputtering

Autor: Markov, L.K., Pavluchenko, A.S., Smirnova, I.P., Aksenova, V.V., Yagovkina, M.A., Klinkov, V.A.
Zdroj: In Thin Solid Films 1 June 2023 774
Databáze: ScienceDirect