Formation of the Structured Indium Tin Oxide Films by Magnetron Sputtering

Autor: Markov, L.K. a, ⁎, Pavluchenko, A.S. a, Smirnova, I.P. a, Aksenova, V.V. a, b, Yagovkina, M.A. a, Klinkov, V.A. b
Zdroj: In Thin Solid Films 1 June 2023 774
Databáze: ScienceDirect