Influence of sputtering pressure on microstructure and layer properties of iridium thin films
| Autor: | Büttner, A., Probst, A.-C., Emmerich, F., Damm, C., Rellinghaus, B., Döhring, T., Stollenwerk, M. |
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| Zdroj: | In Thin Solid Films 30 September 2018 662:41-46 |
| Databáze: | ScienceDirect |
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