Low resistive diamond like carbon film development technique

Autor: Panosyan, Zh.R., Darbasyan, A.T., Meliksetyan, V.A., Voskanyan, S.S., Voskanyan, A.S., Sahakyan, A.A., Gzraryan, R.V.
Zdroj: In Thin Solid Films 2009 517(18):5404-5408
Databáze: ScienceDirect