Low resistive diamond like carbon film development technique
Autor: | Panosyan, Zh.R., Darbasyan, A.T., Meliksetyan, V.A., Voskanyan, S.S., Voskanyan, A.S., Sahakyan, A.A., Gzraryan, R.V. |
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Zdroj: | In Thin Solid Films 2009 517(18):5404-5408 |
Databáze: | ScienceDirect |
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