Failure predictive model of capacitive RF-MEMS

Autor: Mellé, S., De Conto, D., Mazenq, L., Dubuc, D., Poussard, B., Bordas, C., Grenier, K., Bary, L., Vendier, O., Muraro, J.L., Cazaux, J.L., Plana, R.
Zdroj: In Microelectronics Reliability 2005 45(9):1770-1775
Databáze: ScienceDirect