Failure predictive model of capacitive RF-MEMS
Autor: | Mellé, S., De Conto, D., Mazenq, L., Dubuc, D., Poussard, B., Bordas, C., Grenier, K., Bary, L., Vendier, O., Muraro, J.L., Cazaux, J.L., Plana, R. |
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Zdroj: | In Microelectronics Reliability 2005 45(9):1770-1775 |
Databáze: | ScienceDirect |
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