A reliable course of Scanning Capacitance Microscopy analysis applied for 2D-Dopant Profilings of Power MOSFET Devices
| Autor: | Leicht, M., Fritzer, G., Basnar, B., Golka, S., Smoliner, J. |
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| Zdroj: | In Microelectronics Reliability 2001 41(9):1535-1537 |
| Databáze: | ScienceDirect |
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