A reliable course of Scanning Capacitance Microscopy analysis applied for 2D-Dopant Profilings of Power MOSFET Devices
| Autor: | Leicht, M. a, Fritzer, G. a, Basnar, B. b, Golka, S. b, Smoliner, J. b |
|---|---|
| Zdroj: | In Microelectronics Reliability 2001 41(9):1535-1537 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect