Effect of high temperature homoepitaxial growth of β-Ga2O3 by hot-wall metalorganic vapor phase epitaxy

Autor: Ikenaga, Kazutada, Tanaka, Nami, Nishimura, Taro, Iino, Hirotaka, Goto, Ken, Ishikawa, Masato, Machida, Hideaki, Ueno, Tomo, Kumagai, Yoshinao
Zdroj: In Journal of Crystal Growth 15 March 2022 582
Databáze: ScienceDirect