Effect of high temperature homoepitaxial growth of β-Ga2O3 by hot-wall metalorganic vapor phase epitaxy
Autor: | Ikenaga, Kazutada, Tanaka, Nami, Nishimura, Taro, Iino, Hirotaka, Goto, Ken, Ishikawa, Masato, Machida, Hideaki, Ueno, Tomo, Kumagai, Yoshinao |
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Zdroj: | In Journal of Crystal Growth 15 March 2022 582 |
Databáze: | ScienceDirect |
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