| Autor: |
Yajie Yang, Jiajia Lu, Yanbo Xie, Libing Duan |
| Jazyk: |
angličtina |
| Rok vydání: |
2024 |
| Předmět: |
|
| Zdroj: |
Nanotechnology and Precision Engineering, Vol 7, Iss 1, Pp 013008-013008-7 (2024) |
| Druh dokumentu: |
article |
| ISSN: |
2589-5540 |
| DOI: |
10.1063/10.0023848 |
| Popis: |
The development of nanoelectronics and nanotechnologies has been boosted significantly by the emergence of 2D materials because of their atomic thickness and peculiar properties, and developing a universal, precise patterning technology for single-layer 2D materials is critical for assembling nanodevices. Demonstrated here is a nanomachining technique using electrical breakdown by an AFM tip to fabricate nanopores, nanostrips, and other nanostructures on demand. This can be achieved by voltage scanning or applying a constant voltage while moving the tip. By measuring the electrical current, the formation process on single-layer materials was shown quantitatively. The present results provide evidence of successful pattern fabrication on single-layer MoS2, boron nitride, and graphene, although further confirmation is still needed. The proposed method holds promise as a general nanomachining technology for the future. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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