Anodic bonding of mid-infrared transparent germanate glasses for high pressure - high temperature microfluidic applications
| Autor: | Fabrice Célarié, Sandy Morais, Yannick Ledemi, Samuel Marre, Virginie Nazabal, Younes Messaddeq, Julien Ari, Geoffrey Louvet, Bruno Bureau |
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| Přispěvatelé: | Institut des Sciences Chimiques de Rennes (ISCR), Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Ecole Nationale Supérieure de Chimie de Rennes (ENSCR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA), Université Laval [Québec] (ULaval), Institut de Physique de Rennes (IPR), Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Centre National de la Recherche Scientifique (CNRS), Institut de Chimie de la Matière Condensée de Bordeaux (ICMCB), Université de Bordeaux (UB)-Institut Polytechnique de Bordeaux-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), This work was supported by the Canada Excellence Research Chairs, Government of Canada [photonics innovation], Centre National de la Recherche Scientifique [MI - μHPI], Fonds de Recherche du Québec - Nature et Technologies [strategic cluster], Natural Sciences and Engineering Research Council of Canada [strategic project grant]., ANR-12-SEED-0001,CGSµLab,Micro-laboratoires géologiques sur puce pour l'étude des processus clés du transport réactif multiphasique appliqués au stockage géologique du CO2.(2012), Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Ecole Nationale Supérieure de Chimie de Rennes (ENSCR)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Université de Rennes (UR)-Centre National de la Recherche Scientifique (CNRS) |
| Rok vydání: | 2020 |
| Předmět: |
Materials science
Fabrication Infrared microfluidics Infrared spectroscopy 02 engineering and technology Substrate (electronics) 010402 general chemistry 01 natural sciences mid- infrared anodic bonding high pressure/high temperature 300 Processing / Synthesis and Recycling 208 Sensors and actuators General Materials Science Germanate Materials of engineering and construction. Mechanics of materials Germanate glass [PHYS]Physics [physics] business.industry mid-infrared [CHIM.MATE]Chemical Sciences/Material chemistry Optical Magnetic and Electronic Device Materials 505 Optical / Molecular spectroscopy 204 Optics / Optical applications 021001 nanoscience & nanotechnology 0104 chemical sciences Anodic bonding TA401-492 Optoelectronics Microreactor 0210 nano-technology business 107 Glass and ceramic materials TP248.13-248.65 Biotechnology Microfabrication |
| Zdroj: | Science and Technology of Advanced Materials Science and Technology of Advanced Materials, National Institute for Materials Science, 2020, 21 (1), pp.11-24. ⟨10.1080/14686996.2019.1702861⟩ Science and Technology of Advanced Materials, Vol 21, Iss 1, Pp 11-24 (2020) Science and Technology of Advanced Materials, 2020, 21 (1), pp.11-24. ⟨10.1080/14686996.2019.1702861⟩ |
| ISSN: | 1878-5514 1468-6996 |
| DOI: | 10.1080/14686996.2019.1702861 |
| Popis: | High pressure/high-temperature microreactors based on silicon-Pyrex® microfabrication technologies have attracted increasing interest in various applications providing optical access in high-pressure flow processes. However, they cannot be coupled to infrared spectroscopy due to the limited optical transparency (up to ~2.7 μm in the infrared region) of the Pyrex® glass substrate employed in the microreactor fabrication. To address this limitation, the alternative approach proposed in this work consists in replacing the Pyrex® glass in the microreactor by a mid-infrared transparent glass with thermal and mechanical properties as close as possible or even better to those of the Pyrex®, including its ability for silicon-wafers coupling by the anodic bonding process. Glasses based on germanate GeO2, known for their excellent transmission in the mid-infrared range and thermal/thermo-mechanical properties, have been thus evaluated and developed for this purpose. The optical, mechanical, thermal and electrical conductivity properties of adapted glass compositions belonging to five vitreous systems have been systemically investigated. The glass composition 70GeO2-15Al2O3-10La2O3-5Na2O (mol.%) was defined as the best candidate and produced in large plates of 50 mm diameter and 1 mm thickness. Anodic bonding tests with Si-wafers have been then successfully conducted, paving the way for the development of fully mid-infrared transparent silicon-glass microreactors. Graphical abstract |
| Databáze: | OpenAIRE |
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