Very Large Scale Heterogeneous Integration (VLSHI) and Wafer-Level Vacuum Packaging for Infrared Bolometer Focal Plane Arrays

Autor:	Nils Hoivik, Göran Stemme, Björn Samel, Per Ericsson, Niclas Roxhed, Andreas Fischer, Martin Bring, Gjermund Kittilsland, Fredrik Forsberg, Frank Niklaus, Adriana Lapadatu
Jazyk:	angličtina
Rok vydání:	2013
Předmět:	010302 applied physics Microelectromechanical systems Materials science Scale (ratio) Infrared business.industry Bolometer 02 engineering and technology Vacuum packing 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Atomic and Molecular Physics and Optics Focal Plane Arrays Electronic Optical and Magnetic Materials law.invention Long wavelength Optics law 0103 physical sciences Optoelectronics Wafer 0210 nano-technology business
Zdroj:	Infrared Physics & Technology
ISSN:	1350-4495
DOI:	10.1016/j.infrared.2013.05.006
Popis:	Imaging in the long wavelength infrared (LWIR) range from 8 to 14 μm is an extremely useful tool for non-contact measurement and imaging of temperature in many industrial, automotive and security a ...
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c1bcdfe7fb1bc8089d4f9159bf0421c4 Zobrazit plný text záznamu Full Text from ScienceDirect