Some Recent Advances in Contactless Silicon Characterization

Autor: Dieter Schroder
Rok vydání: 2006
Předmět:
Zdroj: ECS Meeting Abstracts. :1232-1232
ISSN: 2151-2043
DOI: 10.1149/ma2006-02/25/1232
Popis: Contactless measurements are attractive because they do not contaminate the sample and generally do not require extensive sample preparation. It is for these reasons that they are more commonly used. We will discuss mainly methods for material but some for device characterization and point out the advantages of these methods and also indicate their short-comings.
Databáze: OpenAIRE