Some Recent Advances in Contactless Silicon Characterization
Autor: | Dieter Schroder |
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Rok vydání: | 2006 |
Předmět: | |
Zdroj: | ECS Meeting Abstracts. :1232-1232 |
ISSN: | 2151-2043 |
DOI: | 10.1149/ma2006-02/25/1232 |
Popis: | Contactless measurements are attractive because they do not contaminate the sample and generally do not require extensive sample preparation. It is for these reasons that they are more commonly used. We will discuss mainly methods for material but some for device characterization and point out the advantages of these methods and also indicate their short-comings. |
Databáze: | OpenAIRE |
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