HRTEM Microstructural Characterization of β-WO3 Thin Films Deposited by Reactive RF Magnetron Sputtering
| Autor: | Renee J. Sáenz-Hernández, Paula Rebeca Realyvazquez-Guevara, A. Arteaga-Durán, María E. Botello-Zubiate, José Andrés Matutes-Aquino, Alejandro Faudoa-Arzate |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
β-WO3
HRTEM Materials science Scanning electron microscope Analytical chemistry 02 engineering and technology lcsh:Technology 01 natural sciences Article chemistry.chemical_compound Sputtering 0103 physical sciences General Materials Science Thin film lcsh:Microscopy High-resolution transmission electron microscopy lcsh:QC120-168.85 010302 applied physics lcsh:QH201-278.5 lcsh:T thin films microstructural Sputter deposition 021001 nanoscience & nanotechnology Tungsten trioxide Amorphous solid Crystallography Carbon film chemistry lcsh:TA1-2040 lcsh:Descriptive and experimental mechanics lcsh:Electrical engineering. Electronics. Nuclear engineering lcsh:Engineering (General). Civil engineering (General) 0210 nano-technology lcsh:TK1-9971 |
| Zdroj: | Materials, Vol 10, Iss 2, p 200 (2017) Materials Materials; Volume 10; Issue 2; Pages: 200 |
| ISSN: | 1996-1944 |
| DOI: | 10.3390/ma10020200 |
| Popis: | Though tungsten trioxide (WO3) in bulk, nanosphere, and thin film samples has been extensively studied, few studies have been dedicated to the crystallographic structure of WO3 thin films. In this work, the evolution from amorphous WO3 thin films to crystalline WO3 thin films is discussed. WO3 thin films were fabricated on silicon substrates (Si/SiO2) by RF reactive magnetron sputtering. Once a thin film was deposited, two successive annealing treatments were made: an initial annealing at 400 °C for 6 h was followed by a second annealing at 350 °C for 1 h. Film characterization was carried out by X-ray diffraction (XRD), high-resolution electron transmission microscopy (HRTEM), scanning electron microscopy (SEM), and atomic force microscopy (AFM) techniques. The β-WO3 final phase grew in form of columnar crystals and its growth plane was determined by HRTEM. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|