Interdigitated electrode arrays made by capillary filling and spin coating for UV-sensor fabrication

Autor: Ethouba Al Jassin-Al-Hashemi, Helmut Schift, Barbara Horváth
Rok vydání: 2019
Předmět:
Zdroj: Flexible and Printed Electronics. 4:035002
ISSN: 2058-8585
DOI: 10.1088/2058-8585/ab3777
Popis: In this paper the fabrication of UV-sensors based on an interdigitated electrode array with a 70 nm sputtered ZnO coating is demonstrated. The electrodes were fabricated using polymer substrates prepatterned with nanoimprint lithography, imprinted with μm-sized grooves and reservoirs at two sides. The V-shaped capillaries were filled with nanoparticle based silver ink either by capillary action in an open-fluidics approach or with spin coating. This enables the use of low-resolution additive methods to fabricate high precision wires for low cost flexible electronics. The 1 × 1 mm2 sensor area contained 100 wires in alternating directions that were electrically insulated from each other, and were attached to contact pads. Characterization of UV sensor devices was carried out experimentally by performing electrical measurements under 355 and 385 nm UV light illumination.
Databáze: OpenAIRE