Interdigitated electrode arrays made by capillary filling and spin coating for UV-sensor fabrication
Autor: | Ethouba Al Jassin-Al-Hashemi, Helmut Schift, Barbara Horváth |
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Rok vydání: | 2019 |
Předmět: |
Spin coating
Materials science Fabrication business.industry Nanoparticle engineering.material Flexible electronics Electronic Optical and Magnetic Materials Nanoimprint lithography law.invention Coating law Electrode engineering Optoelectronics Electrical measurements Electrical and Electronic Engineering business |
Zdroj: | Flexible and Printed Electronics. 4:035002 |
ISSN: | 2058-8585 |
DOI: | 10.1088/2058-8585/ab3777 |
Popis: | In this paper the fabrication of UV-sensors based on an interdigitated electrode array with a 70 nm sputtered ZnO coating is demonstrated. The electrodes were fabricated using polymer substrates prepatterned with nanoimprint lithography, imprinted with μm-sized grooves and reservoirs at two sides. The V-shaped capillaries were filled with nanoparticle based silver ink either by capillary action in an open-fluidics approach or with spin coating. This enables the use of low-resolution additive methods to fabricate high precision wires for low cost flexible electronics. The 1 × 1 mm2 sensor area contained 100 wires in alternating directions that were electrically insulated from each other, and were attached to contact pads. Characterization of UV sensor devices was carried out experimentally by performing electrical measurements under 355 and 385 nm UV light illumination. |
Databáze: | OpenAIRE |
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