| Autor: |
D.J. Beebe, J. Goettert, M.J. Vasile, R.H. Liu |
| Rok vydání: |
2002 |
| Předmět: |
|
| Zdroj: |
Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97). |
| DOI: |
10.1109/sensor.1997.613734 |
| Popis: |
This paper describes the development of microchannel plate prototypes with aspect ratios of 20:1 and a variety of microchannel geometries. The LIGA process is utilized to fabricate nickel molds up to 150 /spl mu/m in height with planarized surfaces. A novel application of spin-on glass is developed to obtain glass structures in Ni molds. A reverse electroplating is used to remove the Ni mold and release the glass structures with height of more than 100 /spl mu/m. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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