Investigation of the LIGA process to fabricate microchannel plates

Autor:	D.J. Beebe, J. Goettert, M.J. Vasile, R.H. Liu
Rok vydání:	2002
Předmět:	Microchannel Optics Materials science business.industry Night vision Electroforming Microchannel plate detector X-ray lithography Dry etching Composite material Electroplating business LIGA
Zdroj:	Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
DOI:	10.1109/sensor.1997.613734
Popis:	This paper describes the development of microchannel plate prototypes with aspect ratios of 20:1 and a variety of microchannel geometries. The LIGA process is utilized to fabricate nickel molds up to 150 /spl mu/m in height with planarized surfaces. A novel application of spin-on glass is developed to obtain glass structures in Ni molds. A reverse electroplating is used to remove the Ni mold and release the glass structures with height of more than 100 /spl mu/m.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::cbd7d8f83f2e0c749bfcfd35ae02b677 https://doi.org/10.1109/sensor.1997.613734 Zobrazit plný text záznamu