Silicon bowtie structure based adjustable nonrigid all-nonmetal metamaterial terahertz filter

Autor: Danni Hao, Yi Zhang, Dongxun Yang, Rui Li, Dan Zhao, Zhenzhen Zhang, Shuai Wang, Wei Jin, Hao Tian, Jiaying Duan, Fei Fan, Shengjiang Chang, Ramiro Maro, Lei Ma
Rok vydání: 2022
Předmět:
Zdroj: Optics Letters. 47:6101
ISSN: 1539-4794
0146-9592
DOI: 10.1364/ol.471704
Popis: An all-nonmetal metamaterial (ANM) terahertz device with a silicon bowtie structure has been developed, which has comparable efficiency to that of its metallic counterparts, and better compatibility with modern semiconductor fabrication processes. Moreover, a highly tunable ANM with the same structure was successfully fabricated through integration with a flexible substrate, which demonstrated large tunability over a wide frequency range. Such a device can be used in terahertz systems for numerous applications, and is a promising substitute for conventional metal-based structures.
Databáze: OpenAIRE