Silicon bowtie structure based adjustable nonrigid all-nonmetal metamaterial terahertz filter
Autor: | Danni Hao, Yi Zhang, Dongxun Yang, Rui Li, Dan Zhao, Zhenzhen Zhang, Shuai Wang, Wei Jin, Hao Tian, Jiaying Duan, Fei Fan, Shengjiang Chang, Ramiro Maro, Lei Ma |
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Rok vydání: | 2022 |
Předmět: | |
Zdroj: | Optics Letters. 47:6101 |
ISSN: | 1539-4794 0146-9592 |
DOI: | 10.1364/ol.471704 |
Popis: | An all-nonmetal metamaterial (ANM) terahertz device with a silicon bowtie structure has been developed, which has comparable efficiency to that of its metallic counterparts, and better compatibility with modern semiconductor fabrication processes. Moreover, a highly tunable ANM with the same structure was successfully fabricated through integration with a flexible substrate, which demonstrated large tunability over a wide frequency range. Such a device can be used in terahertz systems for numerous applications, and is a promising substitute for conventional metal-based structures. |
Databáze: | OpenAIRE |
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