Effect of process parameters on the microstructure and perpendicular magnetic properties of Co3Pt thin films

Autor: C.L. Shen, P.C. Kuo, S.C. Chen, C.D. Chen, S.L. Hsu, G.P. Lin, S.L. Ou, K.T. Huang
Rok vydání: 2011
Předmět:
Zdroj: Thin Solid Films. 519:5199-5202
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2011.01.111
Popis: A Co 3 Pt magnetic layer with a thickness of 7–28 nm was deposited onto a Pt underlayer. As-deposited Co 3 Pt/Pt double-layered films with or without a 5 nm Pt capping layer were annealed at temperatures between 275 and 375 °C. The results show that the out-of-plane coercivity (H c⊥ ) of Co 3 Pt films without a Pt capping layer is larger than that of Co 3 Pt films with a Pt capping layer after annealing. The H c⊥ of the film without a capping layer annealed at 300 °C increased as the thickness of the Co 3 Pt film increased, reaching a maximum H c⊥ value at 18 nm. Also, an 85 nm thick Tb 30 Co 70 film with high perpendicular magnetic anisotropy deposited on a Co 3 Pt(14 nm)/Pt(100 nm) double-layered film enhanced the H c⊥ and out-of-plane squareness (S ⊥ ) values of the Co 3 Pt film.
Databáze: OpenAIRE