| Autor: |
Hakan Urey, Wyatt O. Davis, Dean R. Brown, Sertan Kutal Gokce, Sven Holmstrom |
| Rok vydání: |
2011 |
| Předmět: |
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| Zdroj: |
16th International Conference on Optical MEMS and Nanophotonics. |
| DOI: |
10.1109/omems.2011.6031064 |
| Popis: |
A high-frequency novel torsional MEMS scanner is developed for high resolution microdisplays employing a multi-frame geometry. For the torsional mirror, 26.7° and 36.1° total-optical-scan-angle are achieved at resonance, at atmospheric pressure and vacuum respectively. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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